產品[
日本YAMATO等離子清洗機PR300/301
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產品名稱:
日本YAMATO等離子清洗機PR300/301
產品型號:
PR300/PR301
產品展商:
YAMATO
產品文檔:
無相關文檔
簡單介紹
日本YAMATO等離子清洗機PR300/301
小型等離子清洗機PR300/PR301，廣泛被應用在半導體材料的灰化、蝕刻、干式清洗等方面，外形小巧，價格經濟、
日本YAMATO等離子清洗機PR300/301的詳細介紹
日本YAMATO等離子清洗機PR300/301：
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Low Temperature Asher
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PR300/PR301
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Model
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300
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301
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Method
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Barrel type of DP
DP : direct plasma
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High-frequency Output
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Max.300W
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Oscillating Frequency
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13.56MHz
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Reaction Chamber
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?64×160mm
3 chambers
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?118×160mm
1 chamber
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The PR 300 isagasplasma device that is used widely for suchapplicationsasproduction of semiconductors and analysis work.Itboastsoutstanding operabi lity and safety, with anautomatictuningsystem as a standard component and other features.It has acompactdesign, with a small-size HF generator and anoscillationsectionintegrated with a portion of the chamber,allowing it tobeinstalled into a 19-inch rack.
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Three 64mm diameterchambersareincluded. (PR300)
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The unit can be set for awiderangeof output conditions to handle a variety oftestingsamples.
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One 118mm diameter largechamberisaccommodated.
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 The gas plasmaequipment has a wide range ofapplications fromashing, etching,dry cleaning,etc.
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 Reaction Chamber
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Control Panel
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Operation Flowchart
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Piping System Diagram (PR300)
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Specifications
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Model
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PR300
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PR301
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 Method
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Barrel type of direct plasma
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Controlpart
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Highfrequency output
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300Wvariable (100W×3 chambers)
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Oscillating frequency
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13.56MHz
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Outputimpedance
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50Ω
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Tuningmethod
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Manual biaxial tuning method
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Instrument
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Output watt meter (0 to 300W)
Reflected wave watt meter (0 to 100W)
Vacuum gauge, bourdon's tube type
Flow meter, needle valve integrated type, 1 set
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Timer
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0.1sec. to 999h
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Gasinlet
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1/4"stainless steel
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Powersource (50/60Hz)
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AC100/220V, single phase, 1 kVA
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Reactionpart
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Reactionchamber
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Made ofsuperhardglass, ?64×160mm×3 chanbers
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Madeofpyrexglass, ?118×160mm
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Electrodestructure
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Condenser type, 2-way split
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Controlsystem
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Autopressure reduction, auto leak valve
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Pipingmaterial
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Stailesssteel,Teflon, Copper and Brass
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Stainlesssteel,Teflon
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Externaldimensions(W×D×Hmm)
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438×520×556
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438×520×656
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Weight
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Approx.38kg
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Approx. kg
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StandardAccessories
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Vacuum grease :1 container
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O-ring for reactionchamber:6pcs.
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Sample dish (large andsmall):each4sets
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Lid for reactionchamber:4sets
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Adapter for ground:1pc.
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OptionalAccessories
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Sample dish(large) Sample dish (small) Sample shelf Stand
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