產品[
日本YAMATO在線式等離子清洗機ISP500
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產品名稱:
日本YAMATO在線式等離子清洗機ISP500
產品型號:
ISP500
產品展商:
YAMATO
產品文檔:
無相關文檔
簡單介紹
日本YAMATO在線式等離子清洗機ISP500
在線式等離子清洗機
在產品內容中有關于日本YAMATO在線式等離子清洗機ISP500的詳細介紹。
日本YAMATO在線式等離子清洗機ISP500的詳細介紹
日本YAMATO在線式等離子清洗機ISP500:
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Plasma Apparatus
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ISP500Series
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Plasma Model
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RIE/DP
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RIE : Reactive Ion Etching
DP : Direct Plasma
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RF Generator
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10 to 500W
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OscillatingFrequency
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13.56MHz
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Chamber Size (mm)
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344W×230D×45H
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In-Line and Stand Alone Type (Strip to Strip process)
Outline
Two lead frame(strip)vertical or parallel loading function. Pull out two stripfromMagazine--Loading two strip into the chamber--Plasumacleaningprocess--Unloading two strip from chamber--Strip goes tomagazineor next process to direct.
Total system controlled by PLC controller. LCD touch paneldisplayand operation. Lead frame (strip) size--Up to 25 to80(W)×100 to250(L)×0.2 to 2.5(t)mm also. We can provide CustomizedIn-Lineplasma.
Feature
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Special electrode built inforgetting good plasma efficient.
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RIE/DP mode selectable
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RF power up to 500W
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All automatic operation
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LCD touch panel andPLCcontrol
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Any chamber sizeareavailable for customer's Lead frameorstrip.
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Specifications
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Model
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ISP500 series
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Plasmamethod
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RIE/DPmode
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RFgenerator
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10 to 500W
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Oscillation frequency
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13.56MHz
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Controlsystem
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LCD touchpanelwith PLC
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Tuningmethod
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Automatictuning
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Chambersize
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344(W)×230(D)×45(H)mm
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Electrodesize
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250(W)×180(D)mm
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Gassystem
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Mass flowcontrol2 line
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