產品[
日本YAMATO大氣壓等離子清洗機APPC-400Y
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產品名稱:
日本YAMATO大氣壓等離子清洗機APPC-400Y
產品型號:
APPC-400Y
產品展商:
YAMATO
產品文檔:
無相關文檔
簡單介紹
日本YAMATO大氣壓等離子清洗機APPC-400Y
大氣壓等離子清洗機APPC-400Y
日本YAMATO大氣壓等離子清洗機APPC-400Y 的詳細介紹
日本YAMATO大氣壓等離子清洗機APPC-400Y :
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Plasma apparatus-(Atmosphericpressure plasma cleaner)
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APPC-400Y
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System Outline
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ThisEquipment is Atmosphere Plasma for cleaningsamplesurface.
Easy to make In-Line system with otherEquipment.UnifyandSeparation Type available, Also, Two kindsofElectronics(Insertion and Spout) type available.
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Feature
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Does not need Vacuum systemsuchasVacuum pump and Vacuum chamber.
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Reaction gas use He,Ar andO2mixinggas for cleaning sample surface.
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Sample
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Sanplesize : Any size okay(W) x 45(D) x Max. 15(T)mm
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Equipment Function
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Loading Sample
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Useing conveyor or Armchuckforloading sample
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Sample are continuanceloadingtoelectrode.
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Un-load sample.
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Go to next process
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Automatic andManualoperationselectable.
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Touch panel operation
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Two Electrode can build inforheavydirt cleaning of sample surface.
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Easy to install and easytomakeIn-Line system.
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Electrode and Main unitcanbeseparately. Also, One controller cancontrolTwoElectrode.
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ExternalDimension
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Systemstructure
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Unify type : W800 xL700xH1200mm
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Separately type : W800 xL700xH950mm
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Electrode unit
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RF generator unit (Inthecontrolunit)
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Gas flow unit (Inthecontrolunit)
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Touch panel (On controlunit)
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Cooling unit (Option)
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Loading andUn-loadingunit(Option)
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Electrodeunit
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Gasflowunit
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Two parallel flat plate.
Gas input hole for fill up mixing gas (He and Ar).
Also, water cooling port. (IN and OUT)
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Mass flow controller system
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Ar : Max. 5L/min
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He : Max. 5L/min
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Oxygen : Max. 200mL/min
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Electrode spec.
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Electrode : Aluminum Up to W300xL50x H20mm Water Cooling type.
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Around electrode matirial:Quartzglass
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Controlunit
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Powersupply
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Touch panelandprogrammablecontroller (PLC)
1. Set process recip
 Gas flow
RF power
oading speed (Conveyorspeedetc.)
2. Process monitor
Gas flow, RF power
Error
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3 phase AC220V 25A
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Safetymechanism
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This Equipment builtinsafetyfunction system.
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Builit in safetycoverforElectrode
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