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對應300mm Wafer的小型立式爐
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產品名稱:
對應300mm Wafer的小型立式爐
產品型號:
VF-5900
產品展商:
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產品文檔:
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簡單介紹
對應300mm Wafer的小型立式爐Large batch, Max 100 wafers batch processing
Max 16 FOUP stocksExcellent temperature control from low to medium high temperature range by use of LGO heater
對應300mm Wafer的小型立式爐的詳細介紹
對應300mm Wafer的小型立式爐:
Large batch, Max 100 wafers batch processing
Max 16 FOUP stocks
Excellent temperature control from low to medium high temperature range by use of LGO heater
High-speed wafer transfer by use of single/five wafers handling robot
Equipped with operator friendly high performance control system
| Outer dimension | | W1250×D3200×H3400mm |
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| Heater | LGO heater(ID ø500mm) |
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| Flat zone length | 1040mm |
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| Wafer size | 300mm |
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| Batch size | 100wafers |
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| I/O port | 2 |
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| Number of FOUP stock | 16(standard) |
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| Finger | 5wafers+single wafer |
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| Controller | Model VSC1000 |
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| Option | Forced-cooling system, N2 load lock,
HOST communication(GEM300) |
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