產品[
對應300mm Wafer的小型立式爐
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產品名稱:
對應300mm Wafer的小型立式爐
產品型號:
VF-5700
產品展商:
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產品文檔:
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簡單介紹
對應300mm Wafer的小型立式爐Mini Batch, flexible 25 to 50 wafers batch processingMax 12 FOUP stocksHigh throughput by high-power heater with fast heat upHigh-speed wafer transfer by use of single/five wafers
對應300mm Wafer的小型立式爐的詳細介紹
對應300mm Wafer的小型立式爐:
Mini Batch, flexible 25 to 50 wafers batch processing
Max 12 FOUP stocks
High throughput by high-power heater with fast heat up
High-speed wafer transfer by use of single/five wafers handling robot
Equipped with operator friendly high performance control system
| Outer dimension | | W1250×D2000×H2850mm |
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| Heater | High power LGO heater(ID ø500mm) |
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| Flat zone length | 500mm |
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| Wafer size | 300mm |
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| Batch size | 50wafers |
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| I/O port | 2 |
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| Number of FOUP stock | 12(standard) |
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| Finger | 5wafers+single wafer |
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| Controller | Model VSC1000 |
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| Option | Forced-cooling system, N2 load lock,
HOST communication(GEM300), Stocker less type(VF-5700-F2) |
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